Title :
Dual Chamber Active Charcoal Scrubber
Author :
Moerman, I. ; Coudenys, G. ; Demeester, P. ; Grantham, T. ; Crawley, J.
Author_Institution :
University of Gent-IMEC, Belgium
Keywords :
Acoustics; Chemicals; Epitaxial growth; Epitaxial layers; Gases; Indium phosphide; Nitrogen; Oxidation; Safety; Temperature;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664982
