Title :
Knife-edge thin film field emission cathodes
Author :
Lee, B. ; Demroff, H.P. ; Drew, M.M. ; Elliott, T.S. ; Mazumdar, T.K. ; McIntyre, P.M. ; Pang, Y. ; Smith, D.D. ; Trost, H.J.
Author_Institution :
Dept. of Phys., Texas A&M Univ., College Station, TX, USA
Abstract :
Cathodes made of thin-film field emission arrays (FEA) have the advantages of high current density, pulsed emission, and low bias voltage operation. We have developed a technology to fabricate knife-edge field emission cathodes on (110) silicon wafers. The emitter geometry is optimized for efficient modulation at high frequency. The cathode fabrication progress and preliminary analysis of their applications in RF power sources are presented
Keywords :
cathodes; electron accelerators; electron beams; electron field emission; linear accelerators; nuclear electronics; power supplies to apparatus; thin film devices; RF power sources; Si; Si(110) wafers; cathode fabrication progress; efficient modulation; electron linear colliders; emitter geometry; high current density; high frequency; knife-edge thin film field emission cathodes; low bias voltage operation; pulsed emission; thin-film field emission arrays; Cathodes; Current density; Field emitter arrays; Frequency modulation; Geometry; Low voltage; Metal-insulator structures; Radio frequency; Silicon; Transistors;
Conference_Titel :
Particle Accelerator Conference, 1993., Proceedings of the 1993
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-1203-1
DOI :
10.1109/PAC.1993.309435
