Design and Development of Microstrip Low Pass Filters at K-band Using MEMS Technology

This paper reports two variants of a membrane- supported microstrip low-pass filter (LPF) fabricated using bulk micromachining technique. The two proposed LPFs exhibit low transmission loss (< 2 dB) in the entire pass-band with high out - of-band rejection characteristics. The maximum measured rejection level is better than 50 dB. One of the proposed variant has been diligently designed to deliver high rejection performance with relatively rigid mechanical structure over the other variant thus making it suitable for easy integration and packaging.