DocumentCode
1976085
Title
Application of an Electrochemical Arsine Generator on High Throughput MOVPE Reactor
Author
Burk, A.A., Jr.
Author_Institution
Westinghouse Electric Corporation, Advanced Technology Laboratory, Baltimore, MD
fYear
1992
fDate
8-11 Jun 1992
Firstpage
145
Lastpage
146
Keywords
Buffer layers; Character generation; Doping; Epitaxial growth; Epitaxial layers; Gallium arsenide; Inductors; Laboratories; Temperature measurement; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.664986
Filename
664986
Link To Document