Title :
APCVD preparation of TiNxOy film for multi-functional coating glass
Author :
Duan, Gangfeng ; Zhao, Gaoling ; Lin, Xiaoxuan ; Zhang, Tianbo ; Han, Gaorong
Author_Institution :
Dept. of Mater. Sci. & Eng., Zhejiang Univ., Hangzhou, China
Abstract :
A simple atmospheric pressure chemical vapor deposition method was employed to deposit TiNxOy film on glass substrate. The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.
Keywords :
chemical vapour deposition; glass; solar control films; substrates; titanium compounds; APCVD preparation; TiNO; atmospheric pressure chemical vapor deposition; deposit film; glass substrate; multifunctional coating glass; self-cleaning properties; solar control; Chemical vapor deposition; Coatings; Diffraction; Glass; Heat treatment; Optical films; Production; Reflectivity; Semiconductor films; Tin; TiN xOy film; atmospheric pressure chemical vapor deposition; multi-functional coating glass;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292424
