• DocumentCode
    1976323
  • Title

    APCVD preparation of TiNxOy film for multi-functional coating glass

  • Author

    Duan, Gangfeng ; Zhao, Gaoling ; Lin, Xiaoxuan ; Zhang, Tianbo ; Han, Gaorong

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Zhejiang Univ., Hangzhou, China
  • fYear
    2009
  • fDate
    30-3 Aug. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A simple atmospheric pressure chemical vapor deposition method was employed to deposit TiNxOy film on glass substrate. The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.
  • Keywords
    chemical vapour deposition; glass; solar control films; substrates; titanium compounds; APCVD preparation; TiNO; atmospheric pressure chemical vapor deposition; deposit film; glass substrate; multifunctional coating glass; self-cleaning properties; solar control; Chemical vapor deposition; Coatings; Diffraction; Glass; Heat treatment; Optical films; Production; Reflectivity; Semiconductor films; Tin; TiN xOy film; atmospheric pressure chemical vapor deposition; multi-functional coating glass;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-3829-7
  • Electronic_ISBN
    978-1-4244-3830-3
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2009.5292424
  • Filename
    5292424
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1976323