Micromachined W-band Integrated Rectangular Waveguide Filter Utilising SU-8

Author

Ismail, A. ; Razalli, M.S. ; Mahdi, M.A. ; Darman, W. N I Wan ; Abdullah, R. S A Raja ; Isa, M.M.

Author_Institution

Dept. of Comput. & Commun. Syst. Eng., Univ. Putra Malaysia, Serdang

fYear

2007

fDate

11-14 Dec. 2007

Firstpage

1

Lastpage

4

Abstract

This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A W-band micromachined rectangular waveguide filter utilizing SU-8 micromachining with CPW input and output ports has been designed. Simulated frequency responses exhibit insertion loss of 1.18 dB across 1 GHz bandwidth for W-band frequency range centered at 93 GHz with return loss better than -20 dB.

Keywords

coplanar waveguide components; micromachining; microwave filters; waveguide filters; CPW; SU-8 micromachining; W-band integrated rectangular filter; insertion loss; microwave waveguide filter design; return loss; Band pass filters; Coplanar waveguides; Frequency; Micromachining; Microwave filters; Millimeter wave technology; Planar waveguides; Rectangular waveguides; Resonator filters; Waveguide transitions; coplanar input and output port; micromachined; millimetre-wave filter; rectangular cavity;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. APMC 2007. Asia-Pacific

Conference_Location

Bangkok

Print_ISBN

978-1-4244-0748-4

Electronic_ISBN

978-1-4244-0749-1

Type

conf

DOI

10.1109/APMC.2007.4554831

Filename

4554831