DocumentCode
1977327
Title
A Method for Dosing Solid Sources for MOVPE: Excellent Dosimtery Reproducibility from a Saturated Solution of Trimethylindium
Author
Frigo, Dario M. ; Van Mier, Guido P M ; Gal, Anton W. ; Wilkie, James H.
Author_Institution
Billiton Precursors B.V., Netherlands
fYear
1992
fDate
8-11 Jun 1992
Firstpage
154
Lastpage
155
Keywords
Capacitance-voltage characteristics; Crystals; Dosimetry; Epitaxial growth; Epitaxial layers; Indium phosphide; Reproducibility of results; Solids; Solvents; Surface contamination;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.664991
Filename
664991
Link To Document