Title :
Non-contact and automatic test of micro-size work-piece
Author_Institution :
Sch. of Electron. Inf. Eng., Changchun Univ. of Sci. & Technol., Changchun, China
Abstract :
A test system with the CCD matrix and computer is researched to realize 2-D non-contact and automatic measurement. Micro-size rectangle work-piece is tested as example. The experiments show that the absolute precision is less than 3 μm. The instrument possesses the high accuracy and good repeatability, the system may be used in the product line and makes on line testing possible.
Keywords :
CCD image sensors; automatic testing; 2D noncontact measurement; CCD matrix; automatic measurement; automatic test; microsize work-piece; Arrays; Charge coupled devices; Computers; Digital images; Educational institutions; Semiconductor device measurement; Size measurement; Automatic test; CCD matrix; Computer; Imaging objective; Micro-size work-piece;
Conference_Titel :
Electrical and Control Engineering (ICECE), 2011 International Conference on
Conference_Location :
Yichang
Print_ISBN :
978-1-4244-8162-0
DOI :
10.1109/ICECENG.2011.6057257
