DocumentCode
1977365
Title
Non-contact and automatic test of micro-size work-piece
Author
Jiang, Shuhua
Author_Institution
Sch. of Electron. Inf. Eng., Changchun Univ. of Sci. & Technol., Changchun, China
fYear
2011
fDate
16-18 Sept. 2011
Firstpage
2378
Lastpage
2380
Abstract
A test system with the CCD matrix and computer is researched to realize 2-D non-contact and automatic measurement. Micro-size rectangle work-piece is tested as example. The experiments show that the absolute precision is less than 3 μm. The instrument possesses the high accuracy and good repeatability, the system may be used in the product line and makes on line testing possible.
Keywords
CCD image sensors; automatic testing; 2D noncontact measurement; CCD matrix; automatic measurement; automatic test; microsize work-piece; Arrays; Charge coupled devices; Computers; Digital images; Educational institutions; Semiconductor device measurement; Size measurement; Automatic test; CCD matrix; Computer; Imaging objective; Micro-size work-piece;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Control Engineering (ICECE), 2011 International Conference on
Conference_Location
Yichang
Print_ISBN
978-1-4244-8162-0
Type
conf
DOI
10.1109/ICECENG.2011.6057257
Filename
6057257
Link To Document