• DocumentCode
    1977841
  • Title

    Influence of CCI4on lnP and on the Incorporation of Zn and Si in lnP for Chlorine Assisted Selective Area Epitaxy by AP-MOVPE

  • Author

    Härle, V. ; Rose, B. ; Robein, D. ; Landsbeck, E. ; Scholz, F.

  • Author_Institution
    Universitat Stuttgart, Germany
  • fYear
    1992
  • fDate
    8-11 Jun 1992
  • Firstpage
    158
  • Lastpage
    159
  • Keywords
    Dielectric materials; Doping; Epitaxial growth; Epitaxial layers; Etching; Image motion analysis; Indium phosphide; Radiofrequency interference; Temperature measurement; Zinc;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
  • Print_ISBN
    0-87942-652-7
  • Type

    conf

  • DOI
    10.1109/MOVPE.1992.664993
  • Filename
    664993
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1977841