Title :
Cause and Resolution of Problem of Erratic and Decreasing Trimethylindium Bubbler Delivery Rates:
Author :
Fannin, L.W. ; Webb, D.W. ; Pearce, R.H.
Author_Institution :
Akzo Chemicals Inc, Martinez, Ca.
Keywords :
Chemical compounds; Glass; Indium; MOCVD; Semiconductor materials; Solids; Surface resistance; Temperature; Testing; Weight control;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664997
