DocumentCode
1978155
Title
Structures and Reactions on
Author
Aspnes, D.E. ; Kamiya, Itaru ; Tanaka, H. ; Bhat, R.
Author_Institution
Bellcore, Red Bank, N.J.
fYear
1992
fDate
8-11 Jun 1992
Firstpage
172
Lastpage
172
Keywords
Epitaxial growth; Epitaxial layers; Gallium arsenide; Hydrogen; Molecular beam epitaxial growth; Semiconductor process modeling; Spectroscopy; Surface contamination; Surface reconstruction; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.665000
Filename
665000
Link To Document