• DocumentCode
    1978387
  • Title

    Improved Compositional Uniformity of lnGaAsP Grown by Low Pressure Metal Organic Vapor Phase Epitaxy Using Tertiary Butyl Phosphine as the Phosphorus Source

  • Author

    Zilko, J.L. ; Davisson, P.S. ; Luther, L. ; Trapp, K.D.C.

  • Author_Institution
    AT&T Bell Laboratories, PA
  • fYear
    1992
  • fDate
    8-11 Jun 1992
  • Firstpage
    188
  • Lastpage
    188
  • Keywords
    Ash; Chemistry; Epitaxial growth; Lattices; Photonic band gap; Temperature; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
  • Print_ISBN
    0-87942-652-7
  • Type

    conf

  • DOI
    10.1109/MOVPE.1992.665011
  • Filename
    665011
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1978387