Title :
Improved Compositional Uniformity of lnGaAsP Grown by Low Pressure Metal Organic Vapor Phase Epitaxy Using Tertiary Butyl Phosphine as the Phosphorus Source
Author :
Zilko, J.L. ; Davisson, P.S. ; Luther, L. ; Trapp, K.D.C.
Author_Institution :
AT&T Bell Laboratories, PA
Keywords :
Ash; Chemistry; Epitaxial growth; Lattices; Photonic band gap; Temperature; X-ray diffraction;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.665011
