Title :
A Comparison of the as Compounds Tertiarybutylarsine and Monoethylarsine
Author :
Neumann, N. ; Hövel, R. ; Heime, K.
Author_Institution :
Institut fur Halbleitertechnik, Fed. Rep. of Germany
Keywords :
Ash; Epitaxial growth; Gallium arsenide; Government; Hydrogen; Liquids; Rough surfaces; Surface morphology; Surface roughness; Temperature control;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.665013
