Title :
A VHDL-AMS model of a capacitive accelerometer based on the spring elasticity constant
Author :
Zaharyuk, Roman ; Teslyuk, Vasyl ; Kozak, Iuliia R. ; Alshawabkeh, Hamza Ali Yousef
Author_Institution :
Lviv Polytech. Nat. Univ., Lviv
Abstract :
This paper considers a VHDL-AMS model for a capacitive accelerometer with a beam construction. The model was created for the circuit design level and is based on the spring constant.
Keywords :
accelerometers; capacitive sensors; elastic constants; hardware description languages; microsensors; VHDL-AMS model; beam construction; capacitive microaccelerometer; circuit design level; spring elasticity constant; Accelerometers; Circuit synthesis; Elasticity; Springs; Stress; Structural beams; Torque; Young´s modulus;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6