Title :
A New Approach for Feedback Control of Radius and Growth Rate in Czochralski (Cz) Processes Exemplarily Studied on LEC-InP
Author :
Neubert, M. ; Winkler, J. ; Rudolph, J.
Keywords :
Automatic control; Crystals; Feedback control; Geometry; MONOS devices; Mass production; Reproducibility of results; Robust control; Shape control; Three-term control;
Conference_Titel :
Indium Phosphide and Related Materials Conference Proceedings, 2006 International Conference on
Print_ISBN :
0-7803-9558-1
DOI :
10.1109/ICIPRM.2006.1634132
