Title :
Nanostructuring technologies for reliable moveable elements
Author :
Labunov, V.A. ; Timoshkov, Yu.V. ; Kurmashev, V.I. ; Timoshkov, V.Yu. ; Sakova, A.A.
Author_Institution :
Belarus State Univ. of Inf. & Radioelectron., Minsk
Abstract :
Micro and nanosystems are the completed devices that combine into one sensor, electronic, and mechanical parts. Realization of the mechanical interaction between nano-, micro-, and macro world is the limiting factor for such a complex system.
Keywords :
nanocomposites; nanotechnology; reliability; mechanical interaction; microsystems; nanostructuring technologies; nanosystems; reliable moveable elements; Anisotropic magnetoresistance; Magnetic films; Magnetic heads; Microelectronics; Micromechanical devices; Nanoporous materials; Nanoscale devices; Nanostructured materials; Shape; Silicon; LIGA-like technology; Mechanical moveable elements; nanocomposite materials;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6
