Title :
Novel MEMS fully differential capacitive transducer design and analysis
Author :
Ya, Ma Li ; Khan, Sheroz ; Nordin, Anis Nurashikin ; Al-Khateeb, Khalid A S ; Islam, Muhammad Rafiqul ; Naji, Ahmed Wathik
Author_Institution :
Dept. of Electr. & Comput. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
Abstract :
This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change.
Keywords :
acceleration measurement; capacitive sensors; microsensors; pressure measurement; transducers; MEMS fully differential capacitive transducer analysis; MEMS fully differential capacitive transducer design; acceleration measurement; capacitive sensor; force change parameter measurement; microelectromechanical system; pressure measurement; Capacitance; Capacitive sensors; Force; Integrated circuit modeling; Materials; Micromechanical devices; CMOS; MEMS; differential capacitive sensor;
Conference_Titel :
Mechatronics (ICOM), 2011 4th International Conference On
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-61284-435-0
DOI :
10.1109/ICOM.2011.5937152
