Title :
Characterization of AiGaP/GaP Heterostructures Grown by MOVPE
Author :
Adomi, K. ; Noto, N. ; Nakamura, A. ; Takenaka, T.
Author_Institution :
Shin-Etsu Handotai Co., Ltd., Japan
Keywords :
Compressive stress; Epitaxial growth; Epitaxial layers; Internal stresses; Predictive models; Semiconductor process modeling; Substrates;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.665020
