Title :
High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications
Author :
Chen, Tai-Chang ; Darling, R. Bruce
Author_Institution :
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
Abstract :
We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.
Keywords :
laser ablation; laser beam machining; microfluidics; neodymium; precision engineering; sapphire; silicon; solid lasers; ultraviolet sources; Al/sub 2/O/sub 3/; Si; YAG:Nd; YAl5O12:Nd; laser ablation depths; laser micromachining depths; microfluidic; mid-UV Nd:YAG laser; pulsed ultraviolet Nd:YAG laser; sapphire; silicon;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
