Title :
From Microsystems to Nanotechnology - TUL DMCS projects
Author :
Napieralski, Andrzej
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz
Abstract :
In this paper the presentation of DMCS projects in the domain of Microsystems and Nanotechnology is described. Only the projects with direct participation of TUL DMCS are taken into account.
Keywords :
micromachining; micromechanical devices; nanotechnology; microelectronics; microsystems; nanotechnology; Application software; Computerized monitoring; Gas detectors; Infrared sensors; Integrated circuit modeling; Microelectronics; Micromachining; Monte Carlo methods; Nanotechnology; Silicon; European Framework Projects; International projects; Microelectronics; Microsystems; Nanotechnology; National Polish Grants;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6
