DocumentCode
1980392
Title
From Microsystems to Nanotechnology - TUL DMCS projects
Author
Napieralski, Andrzej
Author_Institution
Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz
fYear
2009
fDate
22-24 April 2009
Firstpage
172
Lastpage
190
Abstract
In this paper the presentation of DMCS projects in the domain of Microsystems and Nanotechnology is described. Only the projects with direct participation of TUL DMCS are taken into account.
Keywords
micromachining; micromechanical devices; nanotechnology; microelectronics; microsystems; nanotechnology; Application software; Computerized monitoring; Gas detectors; Infrared sensors; Integrated circuit modeling; Microelectronics; Micromachining; Monte Carlo methods; Nanotechnology; Silicon; European Framework Projects; International projects; Microelectronics; Microsystems; Nanotechnology; National Polish Grants;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location
Zakarpattya
Print_ISBN
978-966-2191-06-6
Type
conf
Filename
5069744
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