Title :
The influence of the electrode multilayer structure on the quartz resonator parameters
Author :
Mateescu, Irina ; Popescu, Mihai ; Sava, Florinel ; Bradaczek, Hans
Author_Institution :
Nat. Inst. of Mater. Phys., Bucharest, Romania
Abstract :
The influence of the Cr/Au multilayer electrode structure on the electrical parameters of AT-cut quartz resonators was investigated and the results are discussed. Using the Ballato´s exact transmission-line analogs applied to a finite plate with non-distribution of motion, the effective mass-loading and the coupling coefficient were computed. The analysis of the harmonic dependence of the resonator characteristics reveals significant changes of these parameters as a function of electrode configuration. The behavior of the resonator characteristics for different electrode configurations has been explained by internal stresses in electrodes and at the piezoelectric substrate-electrode interface. The three electrode configurations used in experiments have been characterized by X-ray diffraction
Keywords :
chromium; crystal resonators; electrodes; gold; internal stresses; multilayers; AT-cut quartz resonators; Cr-Au-SiO2; Cr/Au multilayer; X-ray diffraction characterisation; coupling coefficient; effective mass-loading; electrical parameters; electrode configuration; electrode multilayer structure; finite plate; harmonic dependence; internal stresses; piezoelectric substrate-electrode interface; quartz resonator parameters; resonator characteristics; three electrode configuration; Chromium; Coupled mode analysis; Electrodes; Frequency measurement; Geometry; Gold; Motion analysis; Nonhomogeneous media; Stress; Transmission lines;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.840802
