Title :
5-kV switches on flexible plastic substrate for electro-active polymer actuators
Author :
Lacour, S.P. ; Wagner, S. ; Pelrine, R. ; Prahlad, H.
Author_Institution :
Dept. of Electr. Eng., Princeton Univ., NJ, USA
Abstract :
In this paper, we demonstrate high voltage (up to 5-kV) thin film switches made on Kapton foil and their integration into a nine-element EAP actuator array. The DC high voltage is supplied to each actuator through a photoconductive switch, which is addressed with a laser. Each cell of the array consists of a 1-cm/sup 2//spl times/30-/spl mu/m thick acrylic diaphragm and a 310-nm thick amorphous silicon switch.
Keywords :
amorphous semiconductors; diaphragms; electric actuators; elemental semiconductors; laser beam effects; photoconducting switches; plasma CVD; polymer electrolytes; semiconductor thin films; silicon; thin film devices; 310 nm; 5 kV; 5-kV thin film switches; DC high voltage; Kapton foil; Si:H; electro-active polymer actuators; flexible plastic substrate; nine-element electro-active polymer actuator array; photoconductive switch; thick acrylic diaphragm; thick amorphous silicon switch; Actuators; Amorphous silicon; Photoconductivity; Plastics; Polyimides; Polymers; Protection switching; Substrates; Switches; Voltage;
Conference_Titel :
Device Research Conference, 2003
Conference_Location :
Salt Lake City, UT, USA
Print_ISBN :
0-7803-7727-3
DOI :
10.1109/DRC.2003.1226883
