Title :
Review of Automated Design and Optimization of MEMS
Author :
Achiche, Sofiane ; Fan, Zhun ; Bolognini, Francesca
Author_Institution :
Tech. Univ. of Denmark, Lyngby
Abstract :
In recent years MEMS saw a very rapid development Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated
Keywords :
micromechanical devices; optimisation; MEMS; automated design; optimization; Design optimization; Fabrication; Fluidics; Inverse problems; Mechanical engineering; Mechanical sensors; Micromechanical devices; Process design; Technological innovation; Very large scale integration;
Conference_Titel :
Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium on
Conference_Location :
Vigo
Print_ISBN :
978-1-4244-0754-5
Electronic_ISBN :
978-1-4244-0755-2
DOI :
10.1109/ISIE.2007.4374941
