Title :
RF MEMS piezoelectric switch
Author :
Gross, S.J. ; Zhang, Q.Q. ; Trolier-McKinstry, Susan ; Tadigadapa, S. ; Jackson, T.N.
Author_Institution :
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
Abstract :
In this paper discussed about the fabrication PbZrTiO/sub 3/ film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.
Keywords :
chemical vapour deposition; dielectric polarisation; lead compounds; microswitches; piezoelectric thin films; zirconium compounds; MEMS piezoelectric switch; PbZrTiO/sub 3/; PbZrTiO/sub 3/ film; resonance frequency measurements; Communication switching; Electrostatics; Gold; Insertion loss; Power semiconductor switches; Power transmission lines; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Voltage;
Conference_Titel :
Device Research Conference, 2003
Conference_Location :
Salt Lake City, UT, USA
Print_ISBN :
0-7803-7727-3
DOI :
10.1109/DRC.2003.1226891
