Title :
MicroTec-3.00 for Windows: educational semiconductor process and device simulator
Author :
Obrecht, Michael S.
Author_Institution :
Siborg Syst. Inc., Waterloo, Ont., Canada
Abstract :
A new version of a PC based 2D semiconductor process and device simulator MicroTec is presented in this paper. Physical models, algorithms and system requirements are described. Some details of the graphical user interface are also presented
Keywords :
computer aided instruction; electronic engineering education; graphical user interfaces; microcomputer applications; semiconductor device models; semiconductor process modelling; software tools; technology CAD (electronics); MicroTec-3.00; PC based simulator; TCAD tool; Windows; algorithms; educational simulator; graphical user interface; physical models; semiconductor device simulator; semiconductor process simulator; system requirements; Electronic mail; Electrostatics; Finite difference methods; Nonlinear equations; Nonlinear systems; Oxidation; Poisson equations; Robustness; Semiconductor process modeling; Steady-state;
Conference_Titel :
Devices, Circuits and Systems, 1998. Proceedings of the 1998 Second IEEE International Caracas Conference on
Conference_Location :
Isla de Margarita
Print_ISBN :
0-7803-4434-0
DOI :
10.1109/ICCDCS.1998.705802
