Title :
A fault simulation methodology for MEMS
Author :
Rosing, R. ; Richardson, A.M. ; Dorey, A.P.
Author_Institution :
Microsyst. Res. Group, Lancaster Univ., UK
Abstract :
Efficient built-in and external test strategies are becoming essential in microelectromechanical systems (MEMS), especially for high reliability and safety critical applications. To be realistic however, internal and external test must be properly validated in terms of fault coverage. Fault simulation is hence likely to become a critical utility within the design flow. This paper discuss methods for achieving test support based on the extension of tools and techniques currently being introduced into the mixed signal ASIC market
Keywords :
failure analysis; fault simulation; micromechanical devices; modelling; FMEA analysis; MEMS; fault coverage; fault simulation methodology; high reliability applications; microelectromechanical systems; safety critical applications; Analytical models; Mechatronics; Microelectromechanical systems; Micromechanical devices; Resonance; Safety; Sensor systems; Springs; System testing; Transducers;
Conference_Titel :
Design, Automation and Test in Europe Conference and Exhibition 2000. Proceedings
Conference_Location :
Paris
Print_ISBN :
0-7695-0537-6
DOI :
10.1109/DATE.2000.840828