Title :
Body-tied double-gate SONOS flash (omega flash) memory device built on bulk Si wafer
Author :
Il Hwan Cho ; Tai-Su Park ; Si Young Choi ; Jong Duk Lee ; Jong-Ho Lee
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea
Abstract :
In this paper, for the first time, a body-tied double-gate SONOS flash memory device using bulk Si wafer is proposed. Brief fabrication steps and measured characteristics are presented.
Keywords :
MIS devices; flash memories; hot carriers; photolithography; MIS devices; SONOS flash memory; Si; Si wafer; channel hot electron injection; omega flash memory; photolithography; silicon-oxide-nitride-oxide-silicon flash memory device; Computer science; Etching; Fabrication; FinFETs; Flash memory; Ion implantation; Materials science and technology; Research and development; SONOS devices; Silicon compounds;
Conference_Titel :
Device Research Conference, 2003
Conference_Location :
Salt Lake City, UT, USA
Print_ISBN :
0-7803-7727-3
DOI :
10.1109/DRC.2003.1226904
