DocumentCode
1981079
Title
550 GHz-f/sub T/ pseudomorphic InP-HEMTs with reduced source-drain resistance
Author
Shinohara, K. ; Yamashita, Y. ; Endoh, A. ; Watanabe, I. ; Hikosaka, K. ; Mimura, T. ; Hiyamizu, S. ; Matsui, T.
Author_Institution
Commun. Res. Lab., Tokyo, Japan
fYear
2003
fDate
23-25 June 2003
Firstpage
145
Lastpage
146
Abstract
In this paper, we adopted a pseudomorphic InGaAs channel to further boost the electron velocity and applied a new multi-layer cap structure to reduce source and drain parasitic resistances to realize even higher RF performance.
Keywords
III-V semiconductors; electric resistance; gallium arsenide; high electron mobility transistors; indium compounds; 550 GHz; HEMT; InGaAs channel; InP-InGaAs; electron velocity; multilayer cap structure; parasitic resistances; source-drain resistance; Current density; Current-voltage characteristics; Delay effects; Etching; Frequency; HEMTs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2003
Conference_Location
Salt Lake City, UT, USA
Print_ISBN
0-7803-7727-3
Type
conf
DOI
10.1109/DRC.2003.1226908
Filename
1226908
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