Title :
Development of ZnO/SiO2/Si love mode surface acoustic wave devices with high sensitivity for biosensor applications
Author :
Krishnamoorthy, Soumya ; Iliadis, Agis A.
Keywords :
Acoustic materials; Acoustic propagation; Acoustic waves; Biosensors; Frequency; Piezoelectric devices; Piezoelectric materials; Substrates; Surface acoustic wave devices; Zinc oxide;
Conference_Titel :
Sensors Applications Symposium, 2006. Proceedings of the 2006 IEEE
Print_ISBN :
0-7803-9580-8
DOI :
10.1109/SAS.2006.1634227