Title :
Autofocusing method for precise nanofabrication using two-photon photopolymerization
Author :
Jung, Byung Je ; Kong, Hong Jin ; Son, Yong ; Yang, Dong-Yol
Author_Institution :
Laser Sci. Res. Lab., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
The total fluorescence by two-photon photopolymerization is used for focusing the laser beam on the surface of a glass substrate automatically. By using this method the 3-D structures are fabricated on the substrate without any loss of the bottom.
Keywords :
fluorescence; laser beams; nanofabrication; optical self-focusing; polymerisation; substrates; 3D structures; autofocusing method; glass substrate; laser beam focusing; nanofabrication; total fluorescence; two-photon photopolymerization; Computer aided manufacturing; Fluorescence; Focusing; Glass; Laser beams; Laser noise; Laser theory; Nanofabrication; Optical device fabrication; Resins; Autofocus; Two-photon photopolymerization;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292660
