• DocumentCode
    1982664
  • Title

    Investigation on laser cleaning of thin films deposited on sapphire

  • Author

    Palani, I.A. ; Kumeda, A. ; Matsumoto, T. ; Higashihata, M. ; Okada, T.

  • Author_Institution
    Dept of Mech. Eng., Indian Inst. of Technol. Madras, Chennai, India
  • fYear
    2009
  • fDate
    30-3 Aug. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The selective and large area laser cleaning of thin films deposited on sapphire substarte was experimentally investigated. The parameters are optimized for efficient cleaning and the samples were analyzed through SEM and AFM.
  • Keywords
    atomic force microscopy; laser materials processing; sapphire; scanning electron microscopy; surface cleaning; AFM; SEM; atomic force microscopy; sapphire substarte; scanning electron microscopy; thin films laser cleaning; Atomic force microscopy; Chemical technology; Cleaning; Laser ablation; Pulsed laser deposition; Scanning electron microscopy; Semiconductor thin films; Sputtering; Substrates; Zinc oxide; Nd3+:YAG; laser cleaning; sapphire substrate; thin films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-3829-7
  • Electronic_ISBN
    978-1-4244-3830-3
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2009.5292676
  • Filename
    5292676
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1982664