Title :
Arsenic Precursor As[N(CH3)2]3 and Role of Its Catalytic Precracking in MOMBE of GaAs
Author :
Koui, Tomoaki ; Suemune, Ikuo ; Fujii, Kazuyuki ; Yamanishi, Masamichi
Author_Institution :
Hiroshima University, Japan
Keywords :
Conductive films; Conductivity; Gallium arsenide; Molecular beam epitaxial growth; Temperature dependence;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.665036
