Arsenic Precursor As[N(CH₃)₂]₃ and Role of Its Catalytic Precracking in MOMBE of GaAs

Author

Koui, Tomoaki ; Suemune, Ikuo ; Fujii, Kazuyuki ; Yamanishi, Masamichi

Author_Institution

Hiroshima University, Japan

fYear

1992

fDate

8-11 Jun 1992

Firstpage

242

Lastpage

243

Keywords

Conductive films; Conductivity; Gallium arsenide; Molecular beam epitaxial growth; Temperature dependence;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

DOI

10.1109/MOVPE.1992.665036

Filename

665036

Link To Document