A micro-manipulator vision in IC Manufacturing

Author

Dantu, R.V. ; Dimopoulos, N.J. ; Pate, R.V. ; Al-Khalili, A.J.

Author_Institution

Dept. of Electr. & Comput. Eng., Concordia Univ., Montreal, Que., Canada

fYear

1988

fDate

24-29 Apr 1988

Firstpage

1455

Abstract

An overview is presented of a micromanipulator vision system for use in automating various functions during the testing of a wafer for semiconducting parameters and inspection of VLSI circuits. Positioning the probe and touching a test pad are the chief concern of the work desired. A brief description of the experimental setup is given. The image processing techniques used in identifying and controlling the location of various components such as the probes and the test pads are discussed. The vision modules and an expert system using hierarchical plan generation to control the sequence of plans are included

Keywords

VLSI; computer vision; expert systems; industrial robots; inspection; integrated circuit manufacture; integrated circuit testing; IC Manufacturing; VLSI; computer vision module; computerised pattern recognition; expert system; image processing; inspection; micromanipulator vision; probes; robots; test pads; wafer testing; Automatic testing; Circuit testing; Machine vision; Manufacturing; Micromanipulators; Probes; Semiconductivity; Semiconductor device manufacture; Semiconductor device testing; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 1988. Proceedings., 1988 IEEE International Conference on

Conference_Location

Philadelphia, PA

Print_ISBN

0-8186-0852-8

Type

conf

DOI

10.1109/ROBOT.1988.12271

Filename

12271