DocumentCode
1983664
Title
A silicon micromachined gyroscope driven by the rotating carrier´s angle velocity
Author
Zhang, Fuxue ; Wang, Hongwei ; Zhang, Wei ; Mao, Xu ; Zhang, Nan
Author_Institution
Sensor Res. Centre, Beijing Inf. Technol. Inst., China
fYear
2005
fDate
27 June-3 July 2005
Abstract
In this paper, a novel silicon micromachined gyroscope is introduced, which is driven by the rotating carrier´s angular velocity. The principle of structure is analyzed .The mathematic module is also established and authors calculate the dynamics parameters of the gyroscope. The theories research and computer imitation have certificated that the principle of the gyroscope is correct.
Keywords
angular velocity; gyroscopes; micromechanical devices; rotation; dynamics parameter; mathematic module; rotating carrier anglular velocity; silicon micromachined gyroscope; Angular velocity; Capacitance; Capacitors; Electrodes; Equations; Gyroscopes; Information technology; Manufacturing; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Information Acquisition, 2005 IEEE International Conference on
Print_ISBN
0-7803-9303-1
Type
conf
DOI
10.1109/ICIA.2005.1635068
Filename
1635068
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