Title :
A silicon micromachined gyroscope driven by the rotating carrier´s angle velocity
Author :
Zhang, Fuxue ; Wang, Hongwei ; Zhang, Wei ; Mao, Xu ; Zhang, Nan
Author_Institution :
Sensor Res. Centre, Beijing Inf. Technol. Inst., China
fDate :
27 June-3 July 2005
Abstract :
In this paper, a novel silicon micromachined gyroscope is introduced, which is driven by the rotating carrier´s angular velocity. The principle of structure is analyzed .The mathematic module is also established and authors calculate the dynamics parameters of the gyroscope. The theories research and computer imitation have certificated that the principle of the gyroscope is correct.
Keywords :
angular velocity; gyroscopes; micromechanical devices; rotation; dynamics parameter; mathematic module; rotating carrier anglular velocity; silicon micromachined gyroscope; Angular velocity; Capacitance; Capacitors; Electrodes; Equations; Gyroscopes; Information technology; Manufacturing; Silicon; Voltage;
Conference_Titel :
Information Acquisition, 2005 IEEE International Conference on
Print_ISBN :
0-7803-9303-1
DOI :
10.1109/ICIA.2005.1635068
