• DocumentCode
    1983766
  • Title

    Chemical Beam Epitaxy of GaAs Films Using Single-Source Precursors

  • Author

    Ekerdt, John G. ; Miller, James E. ; Mardones, Miguel A. ; Nail, John W. ; Cowley, Alan H. ; Jones, Richard A.

  • Author_Institution
    Departments of Chemical Engineering and Chemistry University of Texas at Austin
  • fYear
    1992
  • fDate
    8-11 Jun 1992
  • Firstpage
    247
  • Lastpage
    247
  • Keywords
    Chemical engineering; Chemistry; Epitaxial growth; Epitaxial layers; Gallium arsenide; Inductors; Molecular beam epitaxial growth; Sputtering; Substrates; Temperature distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
  • Print_ISBN
    0-87942-652-7
  • Type

    conf

  • DOI
    10.1109/MOVPE.1992.665040
  • Filename
    665040
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1983766