Title :
Micromechanically tuned ring resonator in silicon on insulator
Author :
Kauppinen, L.J. ; Abdulla, S.M.C. ; Dijkstra, M. ; de Boer, M.J. ; Berenschot, E. ; Krijnen, G.J.M. ; Pollnau, M. ; de Ridder, R.M.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.
Keywords :
Q-factor; cantilevers; integrated optics; micro-optomechanical devices; optical resonators; silicon-on-insulator; Q-factor; Si; micromechanical cantilever; micromechanical tuning; monolithic integration; optical ring resonator; silicon on insulator; voltage 9 V; Optical fibers; Optical ring resonators; Optical surface waves; Optical variables control; Silicon;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193662
