DocumentCode
1984224
Title
Study of AFM-based probe for detecting laser induced surface acoustic wave
Author
Li, Fanghao ; Zhang, Dongxian ; Zhang, Haijun
Author_Institution
State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
fYear
2011
fDate
16-18 Sept. 2011
Firstpage
4988
Lastpage
4990
Abstract
An atomic force microscope (AFM)-based probe applied to detect laser induced surface acoustic wave (SAW) is presented. A YAG pulsed laser source is used to generate the laser induced SAW. The AFM-based probe utilizes a tip attached to a cantilever to detect surface nano-vibration through an interaction of atomic force between the tip and the surface. When the pulsed laser beam irradiates the target sample a SAW will be induced, generating a nano-vibration on the surface. We have detected such nano-vibration as well as SAW by the AFM based probe for the first time. Experimental results show that the laser induced SAW occurs when the YAG laser irradiates the surface, and this kind of SAW can be effectively detected by using the AFM-based probe proposed in the paper.
Keywords
atomic force microscopy; cantilevers; laser beam effects; surface acoustic waves; vibrations; AFM-based probe; YAG pulsed laser source; atomic force microscopy-based probe; cantilever; laser-induced surface acoustic wave detection; pulsed laser beam irradiation; surface nanovibration; Laser beams; Measurement by laser beam; Metals; Probes; Surface acoustic waves; Surface emitting lasers; AFM-based probe; laser induced; nano-vibration; surface acoustic wave;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Control Engineering (ICECE), 2011 International Conference on
Conference_Location
Yichang
Print_ISBN
978-1-4244-8162-0
Type
conf
DOI
10.1109/ICECENG.2011.6057563
Filename
6057563
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