• DocumentCode
    1984224
  • Title

    Study of AFM-based probe for detecting laser induced surface acoustic wave

  • Author

    Li, Fanghao ; Zhang, Dongxian ; Zhang, Haijun

  • Author_Institution
    State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
  • fYear
    2011
  • fDate
    16-18 Sept. 2011
  • Firstpage
    4988
  • Lastpage
    4990
  • Abstract
    An atomic force microscope (AFM)-based probe applied to detect laser induced surface acoustic wave (SAW) is presented. A YAG pulsed laser source is used to generate the laser induced SAW. The AFM-based probe utilizes a tip attached to a cantilever to detect surface nano-vibration through an interaction of atomic force between the tip and the surface. When the pulsed laser beam irradiates the target sample a SAW will be induced, generating a nano-vibration on the surface. We have detected such nano-vibration as well as SAW by the AFM based probe for the first time. Experimental results show that the laser induced SAW occurs when the YAG laser irradiates the surface, and this kind of SAW can be effectively detected by using the AFM-based probe proposed in the paper.
  • Keywords
    atomic force microscopy; cantilevers; laser beam effects; surface acoustic waves; vibrations; AFM-based probe; YAG pulsed laser source; atomic force microscopy-based probe; cantilever; laser-induced surface acoustic wave detection; pulsed laser beam irradiation; surface nanovibration; Laser beams; Measurement by laser beam; Metals; Probes; Surface acoustic waves; Surface emitting lasers; AFM-based probe; laser induced; nano-vibration; surface acoustic wave;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical and Control Engineering (ICECE), 2011 International Conference on
  • Conference_Location
    Yichang
  • Print_ISBN
    978-1-4244-8162-0
  • Type

    conf

  • DOI
    10.1109/ICECENG.2011.6057563
  • Filename
    6057563