Title :
Gas ionization sensors using well-aligned MWCNT arrays grown in porous AAO template
Author :
Chen, Xing ; Huang, Zhongying ; Huang, Jiarui ; Liu, Jinhuai ; Kong, Mingguang
Author_Institution :
Inst. of Intelligent Machines, Chinese Acad. of Sci., Anhui, China
fDate :
27 June-3 July 2005
Abstract :
Porous anodic aluminum oxide (AAO) templates were prepared by a two-step anodization process, then chemical vapor deposition (CVD) method was used to prepare well-aligned open-ended multiwall carbon nanotube (MWCNT) arrays in the AAO templates that also served as catalyst. Gas ionization sensors were fabricated using the MWCNT arrays. The gas ionization sensors featured the electrical breakdown of the ethanol vapor of different concentrations at the carbon nanotube tips, the breakdown voltage decreased with the increase of the ethanol quantity. They had showed good sensitivity and repeatability for detecting ethanol vapor of low concentration in the test gas.
Keywords :
anodisation; carbon nanotubes; chemical vapour deposition; electric breakdown; gas sensors; nanotube devices; AAO template; MWCNT arrays; anodic aluminum oxide; anodization process; breakdown voltage; chemical vapor deposition method; ethanol vapor; gas ionization sensor; multiwall carbon nanotube; Aluminum oxide; Breakdown voltage; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Electric breakdown; Ethanol; Gas detectors; Ionization; Sensor arrays;
Conference_Titel :
Information Acquisition, 2005 IEEE International Conference on
Print_ISBN :
0-7803-9303-1
DOI :
10.1109/ICIA.2005.1635099
