Gas ionization sensors using well-aligned MWCNT arrays grown in porous AAO template

Author

Chen, Xing ; Huang, Zhongying ; Huang, Jiarui ; Liu, Jinhuai ; Kong, Mingguang

Author_Institution

Inst. of Intelligent Machines, Chinese Acad. of Sci., Anhui, China

fYear

2005

fDate

27 June-3 July 2005

Abstract

Porous anodic aluminum oxide (AAO) templates were prepared by a two-step anodization process, then chemical vapor deposition (CVD) method was used to prepare well-aligned open-ended multiwall carbon nanotube (MWCNT) arrays in the AAO templates that also served as catalyst. Gas ionization sensors were fabricated using the MWCNT arrays. The gas ionization sensors featured the electrical breakdown of the ethanol vapor of different concentrations at the carbon nanotube tips, the breakdown voltage decreased with the increase of the ethanol quantity. They had showed good sensitivity and repeatability for detecting ethanol vapor of low concentration in the test gas.

Keywords

anodisation; carbon nanotubes; chemical vapour deposition; electric breakdown; gas sensors; nanotube devices; AAO template; MWCNT arrays; anodic aluminum oxide; anodization process; breakdown voltage; chemical vapor deposition method; ethanol vapor; gas ionization sensor; multiwall carbon nanotube; Aluminum oxide; Breakdown voltage; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Electric breakdown; Ethanol; Gas detectors; Ionization; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Acquisition, 2005 IEEE International Conference on

Print_ISBN

0-7803-9303-1

Type

conf

DOI

10.1109/ICIA.2005.1635099

Filename

1635099