Title :
Experiment investigate on impacts of CO2 laser conditioning on fused quartz surface
Author :
Li, Xibin ; Lv, Haibing ; Wang, Haijun ; Xiang, Xia ; Huang, Jin ; Yuan, Xiaodong ; Zheng, Wanguo
Author_Institution :
Res. Center of Laser Fusion, China Acad. of Eng. Phys., Mianyang, China
Abstract :
Fused silica sill´s surface roughness parameters under different CO2 laser conditioning degrees are satisticed. Samples´ roughness parameters of mild conditioning are statiticed, impurity distribute in some extent and reaonable advice is put forward to.
Keywords :
impurity distribution; laser beam effects; laser materials processing; quartz; surface roughness; SiO2; carbon dioxide laser conditioning; fused quartz surface; fused silica sill; impurity distribution; surface roughness parameters; Laser fusion; Laser theory; Optical devices; Optical scattering; Power lasers; Rough surfaces; Silicon compounds; Surface cracks; Surface emitting lasers; Surface roughness; CO2 laser conditioning; duration time; duty ratio; fused silica; surface roughness;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292740
