Title :
Spatio-temporal manipulation of femtosecond pulses for 3D micro/nano-fabrication
Author :
He, Fei ; Cheng, Ya ; Xu, Zhizhan ; Sugioka, Koji ; Midorikawa, Katsumi
Author_Institution :
State Key Lab. of High Field Laser Phys., Shanghai Inst. of Opt. & Fine Mech., Shanghai, China
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
We demonstrate achieving isotropic resolution in 3D space by spatio-temporal focusing of femtosecond pulses. In this way, homogeneous microfluidic channels and perfect on-chip microlens can be created in glass chips for novel optofluidic applications.
Keywords :
high-speed optical techniques; microlenses; optical focusing; 3D microfabrication; 3D nanofabrication; 3D space; femtosecond pulses; glass chips; homogeneous microfluidic channels; isotropic resolution; on-chip microlens; optofluidic applications; spatio-temporal focusing; spatio-temporal manipulation; Fabrication; Laser beams; Lenses; Microfluidics; Microoptics; Silicon compounds; Ultrafast optics;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193695
