DocumentCode
1985024
Title
Contactless characterization of microwave integrated circuits by device internal indirect electro-optic probing
Author
Taenzler, F. ; Novak, T. ; Kubalek, E.
Author_Institution
Fachgebiet Werkstoffe der Elektrotechnik, Duisburg Univ., Germany
fYear
1993
fDate
6-8 April 1993
Firstpage
120
Lastpage
122
Abstract
Deals with a contactless working test system for the internal test of monolithic microwave integrated circuits (MMIC) based on both: III-V-semiconductor and Si-substrate material. This electro-optic test system determines the electrical field above the test-point within the MMIC. Measurements demonstrate the capability of this test system for device internal function control and failure analysis.<>
Keywords
MMIC; failure analysis; integrated circuit testing; probes; III-V-semiconductor; MMIC; Si; contactless working test system; device internal function control; device internal indirect electro-optic probing; electrical field; electro-optic test system; failure analysis; internal test; microwave integrated circuits; Circuit testing; Contacts; Integrated circuit measurements; Integrated circuit testing; MMICs; Materials testing; Microwave devices; Microwave integrated circuits; Monolithic integrated circuits; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Test Symposium, 1993. Digest of Papers., Eleventh Annual 1993 IEEE
Conference_Location
Atlantic City, NJ, USA
Print_ISBN
0-8186-3830-3
Type
conf
DOI
10.1109/VTEST.1993.313296
Filename
313296
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