Title :
Contactless characterization of microwave integrated circuits by device internal indirect electro-optic probing
Author :
Taenzler, F. ; Novak, T. ; Kubalek, E.
Author_Institution :
Fachgebiet Werkstoffe der Elektrotechnik, Duisburg Univ., Germany
Abstract :
Deals with a contactless working test system for the internal test of monolithic microwave integrated circuits (MMIC) based on both: III-V-semiconductor and Si-substrate material. This electro-optic test system determines the electrical field above the test-point within the MMIC. Measurements demonstrate the capability of this test system for device internal function control and failure analysis.<>
Keywords :
MMIC; failure analysis; integrated circuit testing; probes; III-V-semiconductor; MMIC; Si; contactless working test system; device internal function control; device internal indirect electro-optic probing; electrical field; electro-optic test system; failure analysis; internal test; microwave integrated circuits; Circuit testing; Contacts; Integrated circuit measurements; Integrated circuit testing; MMICs; Materials testing; Microwave devices; Microwave integrated circuits; Monolithic integrated circuits; System testing;
Conference_Titel :
VLSI Test Symposium, 1993. Digest of Papers., Eleventh Annual 1993 IEEE
Conference_Location :
Atlantic City, NJ, USA
Print_ISBN :
0-8186-3830-3
DOI :
10.1109/VTEST.1993.313296
