DocumentCode
1986386
Title
Dimensional and Other New Effects in Advanced SOI Devices
Author
Cristoloveanu, Sorin
Author_Institution
Institut de Microelectronics, Electromagnetism and Photonics (UMR CNRS, INPG & UJF), ENSERG, B.P. 257, 38016 Grenoble Cedex 1, France. E-mail: sorin@enserg.fr
fYear
2005
fDate
19-21 Dec. 2005
Firstpage
69
Lastpage
73
Abstract
Institut de Microelectronics, Electromagnetism and Photonics (UMR CNRS, INPG & UJF), ENSERG, B.P. 257, 38016 Grenoble Cedex 1, France. E-mail: sorin@enserg.fr Abstract-The principles of SOI technology for ultimate scaling are reviewed. Several interesting mechanisms result from the reduction in the transistor volume or from the implementation of several gates. The discussion is based on recent measurements in advanced SOI MOSFETs.
Keywords
CMOS technology; MOSFETs; Silicon carbide; Silicon on insulator technology; Temperature; Thermal conductivity; Transconductance; Transistors; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid-State Circuits, 2005 IEEE Conference on
Print_ISBN
0-7803-9339-2
Type
conf
DOI
10.1109/EDSSC.2005.1635209
Filename
1635209
Link To Document