DocumentCode :
1987761
Title :
Calculations of parameters of BAW microwave composite resonators
Author :
Dulmet, B. ; Mansfeld, G.D.
Author_Institution :
Lab. de Chronometrie Electron. et Piezoelectr., Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
Volume :
2
fYear :
1999
fDate :
1999
Firstpage :
750
Abstract :
This paper uses available models to calculate the main operating parameters of BAW microwave composite resonators. Although such resonators can be used as devices for characterization of the underlying substrate, they can be expected to reach comparatively good performances if the substrate is made from very low loss material, such as YAG driven into vibration by a thin layer of ZnO or AlN. Operating on very high overtone is then quite feasible and solves many technological issues related to the achievement of actually thin membranes. Also, earlier investigations have shown a surprisingly efficient energy trapping on such resonators. The paper presents first investigations about microwave composite resonators operating around 3 GHz, using existing analytical models and shortly discusses issues attached to a two-dimensional FEM. The authors conclude that this technique should evolve to fully develop its expected benefits and must still be substituted by analytical calculations to allow for accurate calculation of parameters in actual devices. Use of existing model for energy trapping analysis seems possible even for very high overtone numbers
Keywords :
acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; finite element analysis; 3 GHz; AlN; AlN layer; BAW microwave composite resonator; YAG; YAG substrate; YAl5O12; ZnO; ZnO layer; analytical model; energy trapping; membrane; two-dimensional FEM; Analytical models; Biomembranes; Electrodes; Electron traps; Equivalent circuits; Impedance; Microwave devices; Predictive models; Q factor; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
ISSN :
1075-6787
Print_ISBN :
0-7803-5400-1
Type :
conf
DOI :
10.1109/FREQ.1999.841413
Filename :
841413
Link To Document :
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