Title :
Batch fabrication of AT-cut crystal resonators up to 200 MHz
Author :
Wüthrich, Christian ; Piazza, Silvio Dalla ; Rüedi, Urs ; Studer, Bruno
Author_Institution :
Asulab. Rue des Sors 3, Marin, Switzerland
Abstract :
AT-cut High Frequency Fundamental quartz resonators have been fabricated up to 200 MHz. Specific problems relating to this range of frequency like the fabrication process or the design of the electrodes are presented. Finished devices have a resistance lower than 20 Ohms, exhibit only few weak spurious modes and are stable during an accelerated ageing measurement
Keywords :
batch processing (industrial); crystal resonators; quartz; 20 ohm; 200 MHz; AT-cut quartz crystal resonator; SiO2; accelerated ageing; batch fabrication; electrical resistance; electrode design; high frequency fundamental mode; spurious modes; Accelerated aging; Boundary conditions; Cutoff frequency; Electrodes; Fabrication; Partial differential equations; Process design; Q factor; Resonance; Resonant frequency;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841428
