SoS aspects of health management technology in substrate manufacturing process

Complex manufacturing processes such as substrate manufacturing could be alive because they change continuously and cyclically in order to improve their health. The health management technology has been proposed as general solution framework for complex systems like manufacturing process. In this article, the System of Systems aspects of the technology and its application are discussed. Firstly, the health management technology is briefly introduced by centering the notion of causality. As its application, causality-based quality control in substrate manufacturing process is developed by applying the technology. Among the quality control, process anomaly diagnosis is investigated by using the real manufacturing production line for experimental use. Experiments were conducted to prove the effectiveness and efficiency of the health management technology.