Title :
Modern state and perspectives of bulk acoustic wave composite resonators
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
The review of the modern state and the perspectives of bulk acoustic wave composite resonators is presented. Special attention is paid to the following topics: what composite resonators are, modern composite resonators including multifrequency resonators, the thin-film resonators with and without acoustic isolation from the substrate. A particular review of the microwave bulk acoustic spectroscopy of the materials - the measurements of attenuation and elastic coefficients is presented
Keywords :
acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; acoustic isolation; attenuation; bulk acoustic wave composite resonator; elastic coefficient; microwave bulk acoustic spectroscopy; multifrequency resonator; thin film resonator; Acoustic devices; Acoustic materials; Acoustic waves; Electrodes; Frequency; Impedance; Modems; Resonance; Substrates; Thin films;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841436
