Title :
Some applications of a stereographic analysis of etching shapes for structures micromachined in singly and doubly rotated quartz plates
Author :
Tellier, C.R. ; Leblois, T.G.
Author_Institution :
Lab. de Chronometrie, Electron. et Piezoelectr., Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
Abstract :
A stereographic analysis of 3D etching shapes is used to recognize rhombohedral faces limiting micromachined structures. Adjustment of the database is performed to generate for these faces extrema in the dissolution slowness. Theoretical shapes for microstructures derived from this new database am found to be in agreement with experiments
Keywords :
etching; micromachining; quartz; 3D etching shape; SiO2; database; dissolution; doubly rotated quartz plate; micromachining; microstructure; rhombohedral face; singly rotated quartz plate; stereographic analysis; Anisotropic magnetoresistance; Biomembranes; Chemicals; Crystals; Databases; Etching; Face recognition; Kinematics; Microstructure; Shape;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841437
