Sensitivity of STW resonators to radial in-plane stress effects: theory and experiments

Author

Ballandras, S. ; Daniau, W. ; Henry-Briot, E. ; Marianneau, G. ; Martin, G.

Author_Institution

Lab. de Phys. et Metrol. des Oscillateurs, Univ. de Franche-Comte, Besancon, France

Volume

2

fYear

1999

fDate

1999

Firstpage

871

Abstract

The design and fabrication of high spectral purity resonators based on surface waves requires a good understanding of the influence of temperature and mechanical stress effects on their frequency stability. The aim of these paper is to present a perturbation model of Surface Transverse Waves (STW) sensitivity to stresses used to predict the frequency variations of STW resonators built on AT cut quartz plates submitted to radial compression. Comparison between theory and experiments is shown to validate the model and to check the stability of STW properties to the propagation direction of the wave

Keywords

compensation; finite element analysis; frequency stability; perturbation theory; stress analysis; stress effects; surface acoustic wave resonators; AT cut quartz plates; FEA; compensation effect; frequency stability; frequency variations; high spectral purity resonators; perturbation model; radial compression; radial in-plane stress effects; stress sensitivity; surface transverse wave resonators; wave propagation direction; Electric variables; Fabrication; Frequency; Oscillators; Predictive models; Resonator filters; Stability; Stress; Surface waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European

Conference_Location

Besancon

ISSN

1075-6787

Print_ISBN

0-7803-5400-1

Type

conf

DOI

10.1109/FREQ.1999.841443

Filename

841443