Title :
Signal amplification with multilayer arrangements on chemical quartz-crystal-resonator-sensors
Author :
Lucklum, Ralf ; Behling, C. ; Hauptmann, P.
Author_Institution :
Inst. for Meas. Technol. & Electron., Otto-von-Guericke Univ., Magdeburg, Germany
Abstract :
Viscoelastic properties of chemically sensitive coatings can amplify the mass sensitivity of quartz-crystal-microbalance-(QCM)-sensors. We developed a sensor concept which is based on a double layer arrangement. Acoustic amplification and chemical sensitivity are separated. With a proper selection of materials the chemical sensitive layer acts pure gravimetrically while the first layer realizes a constant acoustic amplification of the mass effect. Major sensor design parameters are the shear modulus and the thickness of the first layer. They are sufficiently independent from the design of the chemically active layer. Parallel measurement of the resonant frequency of the quartz crystal and its motional resistance in the equivalent circuit can be exploited to check the acoustic amplification
Keywords :
chemical sensors; crystal resonators; equivalent circuits; microbalances; quartz; viscoelasticity; SiO2; chemical quartz-crystal-resonator-sensors; chemical sensitivity; chemically active layer; constant acoustic amplification; double layer arrangement; equivalent circuit; gravimetric layer; mass sensitivity; motional resistance; multilayer arrangements; quartz-crystal-microbalance-sensors; resonant frequency; sensor design parameters; shear modulus; signal amplification; viscoelastic properties; Acoustic materials; Acoustic measurements; Acoustic sensors; Chemical sensors; Coatings; Elasticity; Electrical resistance measurement; Frequency measurement; Nonhomogeneous media; Viscosity;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841471