Title :
Gas phase chemical detection with an integrated chemical analysis system
Author :
Casalnuovo, Stephen A. ; Frye-Mason, Gregory C. ; Kottenstette, Richard J. ; Heller, Edwin J. ; Matzke, Carolyn M. ; Lewis, Patrick R. ; Mangineli, R.P. ; Hietaia, S.L. ; Schubert, W. Kent ; Hietala, Vincent M. ; Sasaki, Darryl Y. ; Reno, John L.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Microfabrication technology has been applied to the development of a miniature, multi-channel gas phase chemical laboratory that provides fast response, small size, and enhanced versatility and chemical discrimination. Each analysis channel includes a sample concentrator followed by a gas chromatographic separator and a chemically selective surface acoustic wave detector array to achieve high sensitivity and selectivity. The performance of the components, individually and collectively, is described. The design and performance of novel micromachined acoustic wave devices, with the potential for improved chemical sensitivity, are also described
Keywords :
chromatography; gas sensors; micromachining; surface acoustic wave sensors; analysis channel; chemical discrimination; chemically selective surface acoustic wave detector array; chromatographic separator; gas phase chemical detection; integrated chemical analysis system; microfabrication technology; micromachined acoustic wave devices; sample concentrator; selectivity; sensitivity; Acoustic arrays; Acoustic signal detection; Acoustic waves; Chemical analysis; Chemical technology; Detectors; Laboratories; Particle separators; Phase detection; Surface acoustic wave devices;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841472
